Semiconductor Chillers

About Semiconductor Chillers & BV Thermal Systems

Controlling the temperature is critical in the production of semiconductor devices.  This sensitive process requires accuracy when dealing with liquid cooling or air condition cooling.   BV Thermal Systems is able to provide accurate, precise and cost effective temperature control equipment for chip manufacturing technologies in the semiconductor industry.

12.5kW Indoor Air-Cooled Chiller

Features Include:

  • Capacity – 12.5kW@15°C Leaving Coolant temperature based on 20°C Condenser water supply temperature
  • 15 to 20°C Temperature Range
  • 3.2 H.P. Premium Efficiency Copeland Scroll type Compressor
  • 14 gallon Aluminum Tank
  • Carel PLC Control with 5.7″ Color Graphics HMI
  • NEMA 1 Enclosure
  • 316 Stainless Steel, Seal-less magnetically coupled, turbine style pump 38 LPM @40 PSI, 1 HP Motor and Mechanical Seal
  • Aluminum Plate Style Evaporator
  • R410A Refrigerant
  • Designated to operate in a Class 100 Clean Room
  • Voltage: 208-230V/3PH/50&60HZ (4wire)
  • 35″ L x 26″ W x 51″H
  • 400 lbs

It is well known that the semiconductor industry has certain criteria for temperature control which if met results in greater yields during rapid thermal processing of silicon wafers. The Semiconductor Chillers manufactured by BV Thermal Systems are up to this rigorous challenge and offer continuous cooling with a standard temperature range from +5° to +35°C. Featuring a low profile design with high quality non-marring locking casters, the Semiconductor Chillers provide a small footprint with exceptional performance and unmatched reliability. It is this combination that makes them the preferred choice for OEM’s and others.

Designed, engineered, manufactured and thoroughly tested in the United States the standard recirculating semiconductor chillers feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chillers are designed to provide years of reliable and accurate liquid temperature control.

If your process requires customization, BV Thermal Systems will engineer, design and manufacture to meet your requirements whether it be footprint, thermal load, size, operating conditions or portability.

With environmentally friendly CFC refrigerant the Semiconductor Chillers feature corrosion free wetted surfaces and are RoHS compliant. With the largest selection of options in the industry, the Semiconductor Chiller may be designed and manufactured to your exact requirements and specifications.

  • Full featured PID controller with easy Auto-tuning
  • External pressure – flow adjustment
  • One positive displacement pump on 60Hz
  • Corrossion free wetted surfaces
  • Adjustable high & Low temperature alarms
  • Level, flow & temperature remote signals
  • Hot gas bypass
  • Seamless polyethylene tank

MODEL MC025 MC033 MC050 MC075
Cooling Capacity 861 watts @ 20°C 1119 watts @ 20°C 1702 watts @ 20°C 2681 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A
Weight (lbs) 30 130 142 180


MODEL MC100 MC150 MC200
Cooling Capacity 3575 watts @ 20°C 5480 watts @ 20°C 6916 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 24.125 x 31.125 x 36 24.125 x 31.125 x 36 38 x 32 x 39
Power Requirements 200-230V, 12A 200-230V, 20A 200-230V, 17A
Weight (lbs) 258 270 404

 


 

MODEL MC300 MC400 MC500 MC600
Cooling Capacity 10,492 watts @ 20°C 13,247 watts @ 20°C 17,614 watts @ 20°C 20,955 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25
Power Requirements 200-230V, 20A 200-230V-3, 16A 200-230V-3, 20A 200-230V-3, 22A
Weight (lbs) 442 484 531 720

 

MODEL MC800 MC1000 MC1500
Cooling Capacity 25,644 watts @ 20°C 33,704 watts @ 20°C 59,700 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 200-230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 825 955 1100