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Semiconductor Chillers


Semiconductor Chillers

For Silicon Wafer Manufacturing and Research

Semiconductor Chillers from BV Thermal Systems are designed for silicon wafer manufacturing and research and feature continuous cooling with temperature from +5° to +27°C.  A low profile design with high quality non-marring locking casters, the Semiconductor Chillers provide a small footprint with exceptional performance and unmatched reliability.

Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers,  the recirculating semiconductor chillers feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chillers are designed to provide years of reliable and accurate liquid temperature control.

 

•Full featured PID controller with easy Auto-tuning 
•Level, flow & temperature remote signals
•External pressure – flow adjustment
•Seamless polyethylene tank with easy fill 3″ port
•Adjustable high & low temperature alarms

MODEL MC025 MC033 MC050 MC075
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2681 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A
Weight (lbs) 130 130 142 180

 


 

MODEL MC100 MC150 MC200
Cooling Capacity 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 200-230V, 12A 200-230V, 20A 200-230V, 17A
Weight (lbs) 258 270 404

 


 

MODEL MC300 MC400 MC500 MC600
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +275°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 48.5 x 33 x 48
Power Requirements 230V, 20A 230V-3, 16A 230V-3, 20A 230V-3, 22A
Weight (lbs) 442 484 531 720

 

MODEL MC800 MC1000 MC1500
Cooling Capacity 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 48.5 x 33 x 48 48.5 x 33 x 60
48.5 x 33 x 60
Power Requirements 230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 825 955 1100