Semiconductor Chiller

BV Thermal  Systems  has built a reputation designing, engineering and manufacturing chillers for the semiconductor market.   Controlling the temperature is critical in the production of semiconductor devices to produce quality silicon wafers and BV Thermal Systems delivers quality semiconductor chillers.

The highly accurate Semiconductor Chiller features a low profile design and is capable of  providing  continuous cooling with temperature from +5° to +35°C,  high quality locking casters and a small footprint.

Manufactured and thoroughly tested in the United States   the water cooled or air cooled chillers feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chillers are designed to provide years of reliable liquid temperature control.

With environmentally friendly CFC refrigerant the Semiconductor Chiller features corrosion free wetted surfaces and is RoHS compliant.  With the largest selection of options in the industry, the Semiconductor Chiller may be designed and manufactured to your exact requirements and specifications.  It is this combination that makes them the preferred choice for OEM’s and others.

Semiconductor Chiller Applications

  • CVD/PVD
  • Etch/Ashing, Wet Etch
  • Implant
  • MOCVD
  • CMP

 

  • RTP
  • Inductively Coupled Plasma and Atomic Absorption Spectometry (ICP/AA)
  • Mass Spectropscopy (MS)
  • Crystal Growing
  • Cutting/Dicing

 

Features of the Semiconductor Chillers Include:

    • Full featured PID controller with easy Auto-tuning
    • External pressure – flow adjustment
    • Hot gas bypass
    • Level, flow & temperature remote signals
    • Corrosion free wetted surfaces
    • Adjustable high & low temperature alarms
    • Seamless polyethylene tank with easy fill 3″ port
    • Four locking casters with non-marring wheels
    • Cooling output indicator

The Chillers for Semiconductors from BV Thermal Systems are designed to handle a variety of fluids including:

  • Galden HT55
  • Galden HT70
  • Galden HT90
  • Galden HT110
  • Galden HT135
  • Galden HT170
  • Galden HT200
  • Galden HT230
  • Galden HT270
  • Galden ZT-130
  • Galden ZT-150
  • Galden ZT-180

MODEL MC025 MC033 MC050 MC075 MC100 MC150 MC200
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2393 watts @ 20°C 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A 200-230V, 12A 200-230V, 20A 200-230V, 17A
Weight (lbs) 30 130 142 180 258 270 404


 

MODEL MC300 MC400 MC500 MC600 MC800 MC1000 MC1500
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 200-230V, 20A 200-230V-3, 16A 200-230V-3, 20A 200-230V-3, 22A 200-230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 442 484 531 720 825 955 1100

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