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Chillers and Heat Exchangers from BV Thermal Systems used in the Semiconductor Industry

Semiconductor Chiller
Silicon Wafer Manufacturing & Research
209-522-3701

Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers,  the recirculating semiconductor chiller features a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chiller is designed to provide years of reliable and accurate liquid temperature control.

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Laser Chillers from BV Thermal SystemsThe Semiconductor Chiller from BV Thermal Systems is designed for silicon wafer manufacturing and research and features continuous cooling with temperature from +5° to +27°C.  With corrosion free wetted surfaces and a  large selection of options the chiller may be designed and manufactured to your exact requirements.

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Designed to fit a standard 19″ rack and with environmentally friendly CFC refrigerant our Rack-Mounted  Chiller features easy to use time tested components such as an adjustable temperature high & low alarm, hot gas by-pass valve and a 100 million cycle solenoid valve. 

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MODEL MC025 MC033 MC050 MC075 MC100 MC150 MC200
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2393 watts @ 20°C 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A 200-230V, 12A 200-230V, 20A 200-230V, 17A
Weight (lbs) 130 130 142 180 258 270 404


 

MODEL MC300 MC400 MC500 MC600 MC800 MC1000 MC1500
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c +5°c to +35°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 200-230V, 20A 200-230V-3, 16A 200-230V-3, 20A 200-230V-3, 22A 200-230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 442 484 531 720 825 955 1100

Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers,  the recirculating semiconductor chiller features a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Semiconductor Chiller is designed to provide years of reliable and accurate liquid temperature control.

Features Include:

•Full featured PID controller with easy Auto-tuning •Level, flow & temperature remote signals
•External pressure – flow adjustment •Corrosion free wetted surfaces
•Adjustable high & low temperature alarms