Liquid Chillers for Semiconductors

Liquid Chillers for Semiconductors

The semiconductor production process requires highly accurate and effective liquid chillers.  This intricate process requires cooling precision to ensure quality processing of silicon wafers for the semiconductor industry.  BV Thermal Systems custom and standard liquid chillers for semiconductors are designed, engineered and manufactured to your specific needs and requirements.   Over the many years of manufacturing, BV Thermal Systems has developed a reputation for delivering chillers that not only meet but exceed the requirements,  resulting in lower defects.  Our Liquid Chillers for Semiconductors offer accurate cooling with temperatures from +5° to +27°C.  Featuring a low profile design with high quality locking casters, the Liquid Semiconductor Chillers provide a small footprint with exceptional performance and unmatched reliability.  It is this combination that makes them the preferred choice for OEM’s and others.

The goal of liquid chillers for semiconductors from BV Thermal Systems is to maximize your production uptime and and consequently your productivity.  One way to ensure production quality is for thorough testing.  Each unit manufactured from BV Thermal Systems is put through many paces and is thoroughly tested in the United States.

With a hot gas by-pass included there is greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the Liquid Chillers for Semiconductors are designed to provide years of reliable liquid temperature control.

With environmentally friendly CFC refrigerant the  Liquid Chillers for Semiconductors feature corrosion free wetted surfaces and are RoHS compliant.  With the largest selection of options in the industry, the Liquid Chillers for Semiconductor manufacturing may be designed and manufactured to your exact requirements and specifications.

  • Full featured PID controller with easy Auto-tuning
  • External pressure – flow adjustment
  • One positive displacement pump on 60 Hz
  • Seamless polyethylene tank with easy fill 3″ port
  • Hot gas bypass
  • Corrosion free wetted surfaces
  • Adjustable high & low temperature alarms
  • Four locking casters with non-marring wheels

MODEL MC025 MC033 MC050 MC075 MC100 MC150 MC200
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2681 watts @ 20°C 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 115V, 9A 115V, 12A 230V, 8A 230V, 10A 230V, 12A 230V, 20A 230V, 17A
Weight (lbs) 130 130 142 180 258 270 404


MODEL MC300 MC400 MC500 MC600 MC800 MC1000 MC1500
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 230V, 20A 230V-3, 16A 230V-3, 20A 230V-3, 22A 230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 442 484 531 720 825 955 110


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