Chillers for Semiconductor Chip Manufacturing from BV Thermal Systems

Chillers for Semiconductor Process Equipment

For Silicon Wafer Manufacturing and Research

Chillers for Semiconductor Process Equipment from BV Thermal Systems are designed for silicon wafer manufacturing and research and feature continuous cooling with temperature from +5° to +27°C.  A low profile design with high quality non-marring locking casters, the Chillers for Semiconductor Process Equipment provide a small footprint with exceptional performance and unmatched reliability.

Designed, engineered, manufactured and thoroughly tested in the United States for accuracy in the thermal processing of silicon wafers,  the Chillers for Semiconductor Process Equipment feature a hot gas by-pass which allows for greater stability and thermal protection for the pump, motor and compressor. With simplicity in design and operation, the BV Thermal Systems Chillers for Semiconductor Process Equipment are designed to provide years of reliable and accurate liquid temperature control.

  • Full featured PID controller with easy Auto-tuning
  • External pressure – flow adjustment
  • Adjustable high & low temperature alarms
  • Level, flow & temperature remote signals
  • Seamless polyethylene tank with easy fill 3″ port

Chillers  for Semiconductors are often used when:

  • Burn-in equipment wafer chuck cooling/heating
  • ATE (automatic test equipment) test head cooling
  • Laser trimming system cooling
  • Metrology tool cooling
  • Process chamber cooling
  • UV cure system cooling

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MODEL MC025 MC033 MC050 MC075 MC100 MC150 MC200
Cooling Capacity 828 watts @ 20°C 1073 watts @ 20°C 1764 watts @ 20°C 2393 watts @ 20°C 3163 watts @ 20°C 4895 watts @ 20°C 7000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c
Pump 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 2.2 GPM to 99 PSI 4.0 GPM to 99 PSI 4.0 GPM to 99 PSI
Reservoir Volume 1.3 gal 1.3 gal 1.3 gal 1.3 gal 2 gal 2 gal 7 gal
Dimensions (w x d x h) in 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 14.5 x 22 x 29 36 x 27 x 29.75 36 x 27 x 29.75 38 x 32 x 39
Power Requirements 115V, 9A 115V, 12A 200-230V, 8A 200-230V, 10A 200-230V, 12A 200-230V, 20A 200-230V, 17A
Weight (lbs) 130 130 142 180 258 270 404


 

MODEL MC300 MC400 MC500 MC600 MC800 MC1000 MC1500
Cooling Capacity 10,000 watts @ 20°C 12,800 watts @ 20°C 16,400 watts @ 20°C 20,000 watts @ 20°C 26,000 watts @ 20°C 34,500 watts @ 20°C 52,000 watts @ 20°C
Stability ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C ±0.1°C
Temperature Range +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +27°c +5°c to +275°c +5°c to +275°c +5°c to +27°c
Pump 4.0 GPM to 99 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 10 GPM to 40 PSI 20 GPM to 40 PSI
Reservoir Volume 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal 7 gal
Dimensions (w x d x h) in 38.5 x 32 x 39 48.5 x 33 x 48 48.5 x 33 x 48 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25 65 x 45 x 42.25
Power Requirements 230V, 20A 230V-3, 16A 230V-3, 20A 230V-3, 22A 230V-3, 26A 460V-3, 20A 460V-3, 28A
Weight (lbs) 442 484 531 720 825 955 1100


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